Li, Q.Q.LiSun, K.K.SunLi, K.K.LiYu, Q.Q.YuRunge, P.P.RungeEbert, W.W.EbertBeling, A.A.BelingCampbell, J.C.J.C.Campbell2022-03-052022-03-052017https://publica.fraunhofer.de/handle/publica/25136110.1109/JLT.2017.2759210We demonstrate high speed and high power evanescently-coupled waveguide integrated modified uni-traveling-carrier (MUTC) photodiodes. Over 105 GHz bandwidth along with 2 dBm and 1.3 dBm RF output power at 100 GHz and 105 GHz, respectively, has been achieved.en535journal article