Skruszewicz, S.S.SkruszewiczPrzystawik, A.A.PrzystawikSchwickert, D.D.SchwickertSumfleth, M.M.SumflethNamboodiri, M.M.NamboodiriHilbert, V.V.HilbertKlas, R.R.KlasGierschke, P.P.GierschkeSchuster, V.V.SchusterVorobiov, A.A.VorobiovHaunhorst, C.C.HaunhorstKip, D.D.KipLimpert, J.J.LimpertRothhardt, J.J.RothhardtLaarmann, T.T.Laarmann2022-05-062022-05-062021https://publica.fraunhofer.de/handle/publica/41613610.1364/OE.446563Short-pulse metrology and dynamic studies in the extreme ultraviolet (XUV) spectral range greatly benefit from interferometric measurements. In this contribution a Michelson-type all-reflective split-and-delay autocorrelator operating in a quasi amplitude splitting mode is presented. The autocorrelator works under a grazing incidence angle in a broad spectral range (10 nm - 1 mm) providing collinear propagation of both pulse replicas and thus a constant phase difference across the beam profile. The compact instrument allows for XUV pulse autocorrelation measurements in the time domain with a single-digit attosecond precision and a useful scan length of about 1 ps enabling a decent resolution of E/DE = 2000 at 26.6 eV. Its performance for selected spectroscopic applications requiring moderate resolution at short wavelengths is demonstrated by characterizing a sharp electronic transition at 26.6 eV in Ar gas. The absorption of the 11th harmonic of a frequency-doubled Yb-fiber laser leads to the well-known 3s3p64p1P1 Fano resonance of Ar atoms. We benchmark our time-domain interferometry results with a high-resolution XUV grating spectrometer and find an excellent agreement. The common-path interferometer opens up new opportunities for short-wavelength femtosecond and attosecond pulse metrology and dynamic studies on extreme time scales in various research fields.enArgon lasersAtom lasersfiber laserspectrometer620621journal article