Hofmann, K.K.HofmannBillep, DetlefDetlefBillepForke, RomanRomanForkeHiller, KarlaKarlaHillerGeßner, ThomasThomasGeßner2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/375184enRobust design of MEMS structuresconference paper