Steiner, K.K.SteinerSulz, G.G.SulzNeske, E.E.NeskeWagner, E.E.Wagner2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/18653910.1016/0925-4005(94)01558-YA Nd:YAG laser beam has been used to anneal thin-film SnO2 gas sensors mounted in TO-8 packages. Annealing temperatures up to 1000 °C for a few minutes significantly improved the sensor signal. In particular, signal drifts can be reduced. Furthermore, signal changes become very fast around an operating temperature of 3000 °C. Saturation and recovery times are within seconds for CO and CH4. Ca-implanted sensors show cross sensitivities towards CO2 and NO2.en621537journal article