Schäfer, L.L.SchäferHöfer, M.M.HöferKröger, R.R.Kröger2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/345814The use of multi-filament arrangements for gas phase activation is highly suitable to meet the industrial demands for activated CVD of diamond coatings. Because of its flexiblility with respect to geometries it can be used for large-area as well as three-dimensional shaped substrates. Hot-filament CVD of diamond can thus be applied to a great variety of products in different fields of applications. It has also been demonstrated, that HFCVD is available on an industrial scale and can be used to deposit other coating materials, thus opening the window for new future applications.en667conference paper