Alasgarzade, NamigNamigAlasgarzadeAlberucci, AlessandroAlessandroAlberucciBlothe, MarkusMarkusBlotheChambonneau, MaximeMaximeChambonneauJisha, Chandroth P.Chandroth P.JishaNolte, StefanStefanNolte2024-04-092024-04-092023https://publica.fraunhofer.de/handle/publica/46590310.1364/CLEO_SI.2023.STh4N.22-s2.0-85176341741We characterize laser-written waveguides in silicon versus the inscription parameters such as scanning speed and pulse energy. The analysis is carried out at different wavelengths and polarization states. Finally, the silicon sample is annealed to investigate the possible mechanism that leads to positive refractive index changes.enconference paper