Houbertz, R.R.HoubertzFröhlich, L.L.FröhlichSchulz, J.J.SchulzPopall, M.M.PopallDomann, G.G.DomannStreppel, U.U.StreppelDannberg, P.P.DannbergBräuer, A.A.BräuerSerbin, J.J.SerbinChichkov, B.N.B.N.Chichkov2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342303en666Inorganic-organic hybrid polymers for information technology - from planar technology to 3-D nanostructuresconference paper