Reinlein, C.C.ReinleinDamm, C.C.DammLange, N.N.LangeKamm, A.A.KammMohaupt, M.M.MohauptBrady, A.A.BradyGoy, M.M.GoyLeonhard, N.N.LeonhardEberhardt, R.R.EberhardtZeitner, U.D.U.D.ZeitnerTünnermann, A.A.Tünnermann2022-03-052022-03-052016https://publica.fraunhofer.de/handle/publica/24595210.1364/OE.24.013527We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm3, and a full mirror of 228 × 210 × 9 mm3. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.en621journal article