Friedrich, D.D.FriedrichBurmeister, O.O.BurmeisterBritzger, M.M.BritzgerBunkowski, A.A.BunkowskiClausnitzer, T.T.ClausnitzerFahr, S.S.FahrKley, E.-B.E.-B.KleyTünnermann, A.A.TünnermannDanzmann, K.K.DanzmannSchnabel, R.R.Schnabel2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35899310.1088/1742-6596/122/1/012018We designed and fabricated an all-reflective 50/50 beam splitter based on a dielectric grating. This beam splitter was used to set up a power-recycled Michelson interferometer with a finesse of about FPR ? 880. Aspects of the diffractive beam splitter as well as of the interferometer design are discussed.en620530conference paper