Kordas, N.N.KordasManoli, Y.Y.ManoliMokwa, W.W.MokwaRospert, M.M.Rospert2022-03-032022-03-031994https://publica.fraunhofer.de/handle/publica/18431210.1016/0924-4247(93)00659-R2-s2.0-0028425852A CMOS compatible monolithic single chip system for the measurement of the electrolytic conductivity of human blood has been developed. The chip combines electrodes, current source, amplifier and digital circuits on a single silicon substrate. A standard CMOS-process has been used with only one additional step for the fabrication of the electrodes, which are made of a thin platinum layer. Due to the small size, the behaviour of the integrated microelectrodes differs strongly from their macroscopic counterparts . The polarization impedance of the electrodes, their noise performance and influences of the planar arrangement on the field distribution have been investigated. A four-electrode-method using a square-wave-current has been developed to avoid errors resulting from parasitic polarization voltages. The chip size is 1 x 5 mm and the measuring current is 10 fA. Measurements with a prototype version of the chip in KCI solution show a linearity of +/- 1%.enCMOS-TechnikCMOS technologyconductivity measurementintegrated electrodeintegrated sensorLeitfähigkeit621537journal article