Pelka, J.J.PelkaLorenz, J.J.LorenzRyssel, H.H.RysselSachs, A.A.SachsSeidl, S.S.SeidlSvoboda, M.M.Svoboda2022-03-022022-03-021985https://publica.fraunhofer.de/handle/publica/172418en670620530621COMPOSITE - A complete modelling program of silicon technologyjournal article