Berzins, J.J.BerzinsIndrisiunas, S.S.IndrisiunasFasold, S.S.FasoldSteinert, M.M.SteinertZukovskaja, O.O.ZukovskajaCialla-May, D.D.Cialla-MayGecys, P.P.GecysBäumer, S.M.B.S.M.B.BäumerPertsch, T.T.PertschSetzpfandt, F.F.Setzpfandt2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26133610.1364/OE.380383Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (< 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.endegrees of freedom (mechanics)laser beammagnetic resonancefabricated systemfocused laser beam620621journal article