A full-wafer mounted self-priming and bubble-tolerant piezoelectric silicon micropump

Linnemann, R.R.LinnemannRichter, M.M.RichterLeistner, A.A.LeistnerWoias, P.P.Woias2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330491enA full-wafer mounted self-priming and bubble-tolerant piezoelectric silicon micropumpconference paper