Duparre, A.A.DuparreKaiser, N.N.KaiserTruckenbrodt, H.H.TruckenbrodtBerger, M.M.BergerKöhler, A.A.Köhler2022-03-082022-03-081993https://publica.fraunhofer.de/handle/publica/321266The roughness of a number of uncoated glass substrates with different surface qualities and of surfaces of fluoride films is investigated by various characterization techniques. The influence of bandwidth limitation and the dependence on the examined sample area become obvious. It is shown that the results obtained from the different measuring methods complement each other appropriately.en620Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and automatic force microscopyconference paper