Duparre, A.A.DuparreGliech, S.S.GliechSteinert, J.J.Steinert2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335747We discuss principles of light scattering measurements: angle resolved scattering (ARS), total scattering (TS) measurements, with special emphasize on the latter and on the DUV/VUV spectral region. The present stage and future requirements of standard procedure ISO 13696 are considered. Examples of measurements on substrates and thin film coatings are presented and related to roughness effects.enangle resolved scatteringtotal scattering measurement620conference paper