Schüller, M.M.SchüllerWalther, M.M.WaltherTröltzsch, J.J.TröltzschOtto, ThomasThomasOttoMehner, J.J.MehnerGeßner, ThomasThomasGeßnerKroll, L.L.Kroll2022-03-142022-03-142014https://publica.fraunhofer.de/handle/publica/4070912-s2.0-85064602499The Chemnitz University of Technology and the Fraunhofer Institute for Electronic Nanosystems ENAS are participating in Excellence-Cluster MERGE. In the sphere of the Integrated Research Domain D Micro- and Nanosystem-Integration in composite structures new approaches for microelectronic components in hybrid structures are developed. The objective is to enable the functionalizing by sensors, actuators and electronics and therefore a further improvement of performance and functional density of hybrid components. In this paper a brief overview of the new concepts is presented.enconference paper