Böttner, P.P.BöttnerBrady, A.A.BradyReinlein, C.C.ReinleinEberhardt, R.R.EberhardtNolte, S.S.Nolte2022-03-062022-03-062021https://publica.fraunhofer.de/handle/publica/26632010.1364/OE.408748This paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 mm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMSerror.endeformationmechanical actuatorsmirrors620621journal article