Defects and gallium - contamination during focused ion beam micro machining

Lehrer, C.C.LehrerFrey, L.L.FreyPetersen, S.S.PetersenMizutani, M.M.MizutaniTakai, M.M.TakaiRyssel, H.H.Ryssel2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/337065en670620530Defects and gallium - contamination during focused ion beam micro machiningconference paper