Richter, W.W.RichterHünermann, L.L.Hünermann2022-03-022022-03-021987https://publica.fraunhofer.de/handle/publica/176007Temperatures, velocities and concentrations of the reactants in the gas phase determine the growth in chemical vapour deposition apart from interface processes. Light scattering techniques can be used to determine these quantities by in situ experiments with high spatial resolution. In particular, this Paper discusses rotational Raman scattering, laser Doppler anemometry and vibrational Raman scattering. The latter turns out to be especially useful when non-linear techniques such as Coherent anti-Stokes Raman Scattering are chosen. (ILT)enanemometryCARSchemical vapour depositionlaser dopplerMOCVDraman scattering621541journal article