Tschernajew, MaximMaximTschernajewHädrich, SteffenSteffenHädrichKlas, RobertRobertKlasGebhardt, MartinMartinGebhardtHorsten, Roland C.Roland C.HorstenWeerdenburg, SvenSvenWeerdenburgPyatchenkov, Sergey V.Sergey V.PyatchenkovCoene, Wim M.J.Wim M.J.CoeneBreitkopf, SvenSvenBreitkopfHerrfurth, OliverOliverHerrfurthRothhardt, JanJanRothhardtEidam, TinoTinoEidamLimpert, JensJensLimpert2023-07-062023-07-062022https://publica.fraunhofer.de/handle/publica/44525510.1364/EUVXRAY.2022.ETh3A.32-s2.0-85136780884We present a highly stable, easy-to-use HHG source delivering a record photon flux of >1011 photons/s at 69eV-75eV, being tunable to approx. 100eV which will be used for future photon-hungry applications.enconference paper