Kogel-Hollacher, M.M.Kogel-HollacherStamm, H.H.StammNiessen, M.M.NiessenAlunovic, M.M.AlunovicTreusch, H.G.H.G.TreuschAden, M.M.AdenKreutz, E.W.E.W.Kreutz2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/324708The electron density, the plasma front velocity and the geometry of an expanding vapour/plasma are investigated during the material removal of Al2O3 with pulsed CO2 laser radiation. The results obtained by the beam deflection method are compared with those of optical emission spectroscopy and plasma modelling. The size and density of condensed particles are determined from measured probe beam extinctions during the material removal of Al with pulsed Nd: YAG laser radiation.enelectron densityinfrared detectorlaser ablationphoton drag detectorprobe laser beamresulting layer621conference paper