Fink, J.J.FinkNücker, N.N.NückerSah, R.E.R.E.SahBaumann, H.H.BaumannBethge, K.K.BethgeKoidl, P.P.Koidl2022-03-082022-03-081987https://publica.fraunhofer.de/handle/publica/315542Amorphous carbon films (a-C:H,F) were prepared from fluorinated benzenes. The films were investigated by optical spectroscopy, by depth profiling with nuclear reactions and by electron energy-loss spectroscopy. Changes in the density and in the microstructure compared to a-C:H films may be explained by the different size of the H and F atoms.enKohlenstoffilmPlasmaabscheidung621667Composition and structure of plasma deposited a-C - H,F filmsZusammensetzung und Struktur der a-C - H,F Filme aus Plasmaausscheidungconference paper