Topography correlation - a powerful tool applied to the visualisation of remote plasma hydrogen passivation effects

Rinio, M.M.RinioHauser, A.A.HauserMöller, H.J.H.J.Möller2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/342022en621697Topography correlation - a powerful tool applied to the visualisation of remote plasma hydrogen passivation effectsconference paper