Keller, MarkusMarkusKellerGommel, UdoUdoGommel2022-03-042022-03-042012https://publica.fraunhofer.de/handle/publica/228231The outgassing behavior of materials used in cleanroom environments gains increasing importance in different industries. Especially in newly planned or built semiconductor, photovoltaic and aerospace cleanroom settings, a maximum allowed level of volatile organic contamination (VOC) according to ISO 14644-8 is already often defined in the planning phase. A newly standardized method for the determination and classification of building materials regarding their VOC outgassing properties is described in this article. Chamber measurements of different screened materials are performed using a micro-chamber and collection of the emitted VOC on Tenax sorbent tubes followed by thermo desorption gas-chromatography coupled with mass spectroscopy analysis (TD-GC/MS). The calculated surface specific emission rate (SER) is then converted into a newly introduced easy comparable material classification number AMCm (or) = x. The described method is published in the new guideline draft VDI 2083 part 17 (2011). A public available database for material selection and comparison gives all engineers involved in cleanroom planning and operation a useful tool to estimate the expected ISO-AMC level of total volatile organic compounds (TVOC) based on the selection of included materials.enCleanroomAusgasungVOC EmissionReinraumMessenWerkstoffKlassifikationjournal article