Bochow-Ness, O.O.Bochow-NessEckert, T.T.EckertFujino, M.M.FujinoMiddendorf, A.A.MiddendorfReichl, H.H.Reichl2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/357207en621620Condition Indicators for Reliability Monitoring of Microsystemsconference paper