Kaiser, N.N.KaiserZuber, A.A.ZuberKaiser, U.U.Kaiser2022-03-032022-03-031993https://publica.fraunhofer.de/handle/publica/18284810.1016/0040-6090(93)90754-DIn this paper we have focused on the investigation of the structure of MgF2 thin films. Spectroscopic ellipsometry (SE) (SOPRA) has been used to evaluate optical inhomogenities, namely the depth-distribution of water-filled voids and the dispersion of the refractive index in the 250-900 mm vavelength region. The SE data regression analysis was supported by transmission electron microscopy (TEM) structure models and confirmed by SIMS.enoptical thin filmsspectroscopic ellipsometry620541journal article