Füchsel, K.K.FüchselSchulz, U.U.SchulzKaiser, N.N.Kaiser2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/354956ITO films are suitable to achieve transparent and conductive thin films for a multiplicity of applications. Electrical and optical properties of ITO films prepared by plasma ion-assisted deposition at low substrate temperatures will be presented.enthin filmcoatingother property620conference paper