Fritscher, AndreasAndreasFritscherWartenberg, PhilippPhilippWartenbergRichter, BerndBerndRichterDamnik, SteffenSteffenDamnikSchuster, FlorianFlorianSchusterSchlebusch, DirkDirkSchlebuschRolle, MartinMartinRolleBrenner, StephanStephanBrennerZeltner, JohannesJohannesZeltnerLenk, SimoneSimoneLenkVogel, UweUweVogel2024-04-032024-04-032024https://publica.fraunhofer.de/handle/publica/46465810.1117/12.3004097Using smaller CMOS nodes for the design of backplanes for light modulator enables the integration of additional features. This paper reports on a backplane designed in 28nm technology which embeds a complete framebuffer as well as a programmable high speed data interface which can realize up to 576Gbit/s data transfer rate to pixel array utilizing a 1440 x 1080 resolution with a 2.5 micron pixel capable for LCOS, OLED and micro-LED front planes. The programmable modulation scheme will be discussed in detail using typical scanning examples.enSpatial light modulatorsCMOS backplanedriver ICOLED-on-SiliconLCOSmicroLEDdigital opticsDDC::600 Technik, Medizin, angewandte Wissenschaftenconference paper