Light management of aluminum doped zinc oxide thin films by fabricating periodic surface textures using direct laser interference patterning

Eckhardt, S.S.EckhardtRoch, T.T.RochSachse, C.C.SachseLasagni, A.F.A.F.Lasagni2022-03-042022-03-042013https://publica.fraunhofer.de/handle/publica/23238710.1002/adem.2013000072-s2.0-848780077572-s2.0-84886596073Large area micro and sub-micrometer structuring of TCO thin film layers is performed using a laser based one-step procedure. The fabricated hexagonal arranged surface patterns with 800 nm spatial period show a higher performance in both transparency and diffraction properties compared to line-like textured and non-patterned substrates. Furthermore, non-significant variations of the electrical resistance are observed after the laser treatment.en621671620Light management of aluminum doped zinc oxide thin films by fabricating periodic surface textures using direct laser interference patterningjournal article