Sandner, T.T.SandnerGrasshoff, T.T.GrasshoffSchwarzenberg, M.M.SchwarzenbergSchenk, H.H.Schenk2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/38354310.5162/opto2013/o1.4This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5mm a synchronized driven MEMS scanner array - consisting of five hybrid assembled MEMS devices - are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3EL5mm at 7.5m measuring range for a gray target.en621conference paper