Goehlich, A.A.GoehlichVogt, H.H.VogtDebusmann, K.K.DebusmannTrieu, H.-K.H.-K.Trieu2022-03-042022-03-042010https://publica.fraunhofer.de/handle/publica/221803en621Customized mems process development. A pressure sensor for high temperature and high pressure applicationsbook article