Klumpp, A.A.KlumppWieland, R.R.WielandEcke, R.R.EckeSchulz, S.E.S.E.Schulz2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21756410.1002/9783527623051.ch9enMetallization by chemical vapor deposition of W and Cubook article