Layer-by-layer interference lithography of three-dimensional microstructures in SU-8

Lasagni, A.F.A.F.LasagniYuan, D.J.D.J.YuanDas, S.S.Das2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/21873310.1002/adem.2008003822-s2.0-67049100251en621620Layer-by-layer interference lithography of three-dimensional microstructures in SU-8journal article