Dietrich, D.D.DietrichWillich, P.P.WillichStöckel, S.S.StöckelWeise, K.K.WeiseMarx, G.G.Marx2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19655110.1007/s0060400700902-s2.0-24944549655en667543SIMS profiling and TEM of CVD films on multi-filament samplesjournal article