Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect size

Nutsch, A.A.NutschSupplieth, F.F.SuppliethPfitzner, L.L.PfitznerRyssel, H.H.Ryssel2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34947910.1109/ISSM.2005.15133472-s2.0-28744437015en670620530Reliable matching of 300 mm defect inspection tools @ sub 60 nm defect sizeconference paper