Low-temperature plasma processing of materials: Past, present, and future

D'Agostino, R.R.D'AgostinoFavia, P.P.FaviaOehr, ChristianChristianOehrWertheimer, M.R.M.R.Wertheimer2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/20968510.1002/ppap.200400074en610620660530Low-temperature plasma processing of materials: Past, present, and futurejournal article