Rouzo, J. leJ. leRouzoRibet-Mohamed, I.I.Ribet-MohamedGuerineau, N.N.GuerineauTauvy, M.M.TauvySchneider, H.H.SchneiderMaier, ThomasThomasMaier2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34781010.1117/12.603289QWIPs are nowadays considered as rather good candidates for multispectral imaging. Indeed, their narrow spectral bandwidth can be tailored by band gap engineering, and they rely on the use of the mature GaAs technology. However, a light coupling scheme, such as 2D-grating for example, is required to obtain normal incidence absorption. The geometrical parameters of this 2D-grating (grating period, etch depth of the grating) need to be optimized. This optimization is particularly difficult for dual-band pixels, since a compromise is required between the two wavelengths. This paper deals with the influence of the etch depth of the grating on the angular response of quantum well infrared photodetectors. We will first present the experimental setup which was specifically developed at ONERA to perform angular response measurements on infrared photodetectors from different technologies. The results obtained on "low-noise" QWIP samples provided by Fraunhofer-IAF will be presented and analyzed, with emphasis on the effect of the etch depth of the grating on the angular response.enGaAs/AlGaAsQwipgratingGitterdiffractionBeugung621667Angular response of grating-coupled quantum well infrared photodetectors: An experimental studyWinkelabhängige Response von gittergekoppelten Quantumwell Infrarot-Photodetektoren: Eine experimentelle Studieconference paper