Under CopyrightSchmitt, RobertRobertSchmittUlm, AndreasAndreasUlm2024-05-232024-05-232024-05-13https://publica.fraunhofer.de/handle/publica/468673https://doi.org/10.24406/publica-309010.24406/publica-3090Mobile optical metrology techniques face the problem of difficult alignment, e.g., in strain metrology of moving parts or for regular inspections. This time-consuming and costly step might become faster by an active angle calibration with diffractive nanostructures.We propose a design for diffractive nanostructures which allow for an active angle calibration.enDiffractive nanostructuresNanostructuresTwo-photon polymerizationOptical metrologyStrain measurementDDC::600 Technik, Medizin, angewandte Wissenschaften::620 IngenieurwissenschaftenDiffractive nanostructures for angle calibration of optical metrology systemsposter