Duparre, A.A.DuparreKaiser, N.N.Kaiser2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/192046The paper dicusses several aspects of thin-film and substrate surface microstructures as they relate to scatter losses. Surface roughness and scatter are related through Power Spectral Density analysis of AFM roughness data. A practical way is shown how to predict scatter effects when PSD curves are known.enatomic force microscopylight scatteringmicrostructureoptical losssurface roughnessthin filmUV coating620535journal article