Schwarz, F.F.SchwarzSenger, F.F.SengerAlbers, J.J.AlbersMalaurie, P.P.MalaurieJanicke, C.C.JanickePohl, L.L.PohlHeinrich, F.F.HeinrichKaden, D.D.KadenQuenzer, H.-J.H.-J.QuenzerLofink, F.F.LofinkBahr, A.A.BahrWantoch, T. vonT. vonWantochHofmann, U.U.Hofmann2022-03-142022-03-142020https://publica.fraunhofer.de/handle/publica/40853310.1117/12.2546035Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.en621conference paper