Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning

Dura, H.-G.H.-G.DuraHosticka, B.J.B.J.HostickaMokwa, W.W.MokwaSchöneberg, U.U.SchönebergVogt, H.H.Vogt2022-03-032022-03-031992https://publica.fraunhofer.de/handle/publica/18180510.1016/0925-4005(92)80049-42-s2.0-0026459240Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to take place. Measurements show an improved long-term stability. A comparison between the integrated sensor system and a gas-sensitive FET integrated on the same chip allows these different types of sensors to be directly compared.engas sensorgassensorhydrogen sensorLangzeitverhaltenlong-term stabilitymeasurement probeMeßaufnehmerWasserstoff621541Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioningjournal article