Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis

Under CopyrightOppel, SteffenSteffenOppelSchneider, AdrianAdrianSchneiderSchütz, MichaelMichaelSchützKaminzky, DanielDanielKaminzkyKallinger, BirgitBirgitKallingerWeber, JonasJonasWeberKrieger, MichaelMichaelKrieger2022-03-1220.10.20152015https://publica.fraunhofer.de/handle/publica/38928610.24406/publica-fhg-389286enphotoluminescencedefectsSilicon Carbide (SiC)defect luminescence scanner670620530Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysispresentation