CC BY 4.0Giese, ChristianChristianGieseQuellmalz, PatriciaPatriciaQuellmalzKnittel, PeterPeterKnittelLuo, TingpengTingpengLuoMathes, NiklasNiklasMathesJeske, JanJanJeskeReinke, PhilippPhilippReinkeYang, QuankuiQuankuiYang2023-12-182024-02-052025-01-292023-12-182024https://doi.org/10.24406/publica-2339https://publica.fraunhofer.de/handle/publica/45809910.1002/pssa.20230043310.24406/publica-2339Herein, methods for the fabrication of monolithic diamond integrated photonic devices via Faraday cage‐angled etching of functional epitaxial diamond layers are presented. Optimal waveguide width is determined via simulation and the fabrication of nitrogen vacancy (NV) center‐doped microring resonators is demonstrated. The performance of the devices is verified via microphotoluminescence as well as cathodoluminescence scans of the in‐grown NV centers, revealing clearly visible cavity lines. The scalable fabrication method allows for the realization of large numbers of lateral waveguide structures as needed for future applications in integrated quantum sensing devices as well as novel spin‐based quantum computers.enjournal article