Precision laser droplet soldering of components for Multi Shaped Beam Lithography

Burkhardt, T.T.BurkhardtMohaupt, M.M.MohauptZaage, B.B.ZaageBeckert, E.E.BeckertEberhardt, R.R.EberhardtTünnermann, A.A.TünnermannDöring, H.-J.H.-J.Döring2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/3952012-s2.0-84976332671enPrecision laser droplet soldering of components for Multi Shaped Beam Lithographyconference paper