Gaßner, SimonSimonGaßnerEssing, SimonSimonEssingTumpold, DavidDavidTumpoldSchmitt, KatrinKatrinSchmittWöllenstein, JürgenJürgenWöllenstein2023-08-172023-08-172023https://publica.fraunhofer.de/handle/publica/44833310.5162/SMSI2023/E7.1The increasing interest in monitoring indoor air quality has led to a growing demand for simple and smallscale gas sensors. We present a miniaturized photoacoustic dual chamber sensor module that includes an infrared hotplate emitter and a wafer-level manufactured photoacoustic detector. The sensor module was controlled by a PSoC 4200M microcontroller and is capable of being soldered in a SMD reflow soldering process. The sensor prototype achieves a 3‑sigma noise level of 138 ppm CO2, which is suitable for most consumer applications.enPhotoacoustic gas sensorGas sensorWafer-levelCarbon dioxideMEMSconference paper