Su, J.J.SuNiekiel, F.F.NiekielFichtner, S.S.FichtnerKirchhof, C.C.KirchhofMeyners, D.D.MeynersQuandt, E.E.QuandtWagner, B.B.WagnerLofink, F.F.Lofink2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26387010.1088/1361-6439/ab8dd0This paper reports on frequency tunable MEMS magnetoelectric (ME) sensors. Different designs are studied in respect to ME voltage coefficient and frequency tunability. Compared to state-of-the-art ME sensors, the presented ME resonators display a highly reversible and linear frequency tuning, enabled by applying a DC voltage to piezoelectric actuators. A frequency shift of up to 0.2 Hz V-1 is demonstrated for a sensor with a limit of detection of 128 pT/Hz0.5 at resonance frequency of 13 kHz. This sensor type is of particular interest for vector field sensors and sensor arrays in bio-magnetic applications, where sensors with either identical resonance frequencies or precisely defined frequency spacing are required.en621journal article