Rothhardt, PhilipPhilipRothhardtMeier, S.S.MeierJiang, K.K.JiangWolf, AndreasAndreasWolfBiro, DanielDanielBiro2022-03-125.11.20142014https://publica.fraunhofer.de/handle/publica/38546410.24406/publica-r-38546410.4229/EUPVSEC20142014-2DO.4.4We present co-diffused bifacial n-type solar cells (CoBiN) with peak efficiencies of 19.9 %. The codiffusion process is based on a high temperature step in an atmosphere containing POCl3 and a BSG/SiOx layer stack deposited by atmospheric pressure chemical vapor deposition. Secondary ion mass spectroscopy measurements show that the reaction of POCl3 with the SiOx layer results in the formation of a PSG layer converting a fraction of the SiOx layer. Electrochemical capacitance voltage measurements do not detect an influence of POCl3 on the boron emitter.enPV Produktionstechnologie und QualitätssicherungSilicium-PhotovoltaikDotierung und DiffusionOberflächen - KonditionierungPassivierungLichteinfangKontaktierung und Strukturierungn-typebifacialCo-Diffusion621697conference paper