Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres

Beichele, M.M.BeicheleBauer, A.J.A.J.BauerRyssel, H.H.Ryssel2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19835110.1016/S0026-2714(99)00287-5en670620530621Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheresjournal article