Zengerle, R.R.ZengerleRichter, A.A.RichterKluge, S.S.Kluge2022-03-082022-03-081997https://publica.fraunhofer.de/handle/publica/303725The invention relates to a process and a device for controlling a micropump by means of a driver signal in such a way that a conveyance direction defined by a valve structure is reversed, whereby the driver signal is applied to the micro diaphragm pump at an exciter frequency, whereby the exciter frequency is in the range of a resonance of a system formed from the movable parts of the micropump and the fluid to be pumped.de608621patent1994-4433894