Under CopyrightLim, MinwhoMinwhoLimRusch, OlegOlegRuschErlbacher, TobiasTobiasErlbacherBauer, AntonAntonBauer2022-03-157.12.20212021https://publica.fraunhofer.de/handle/publica/41322010.24406/publica-fhg-413220en670620530Device Design and Process Integration of SiC Trench MOSFETspresentation